Formation of WO3 by remote plasma assisted oxidation of tungsten thin films

Surface and Coatings Technology

Journal Article

Wassim Kassem

Malek Tabbal

Mohamad Roumie

Publication

Year of publication: 2016

Identifiers

ISSN: 0257-8972

Other: 2-s2.0-84989221507

Locators

DOI: 10.1016/j.surfcoat.2016.09.046